Aluminas

Alumina-Dome-Isolated

Aluminum Oxide — Al2O3
One of the most robust technical ceramic materials, high-purity aluminas feature enhanced corrosion, low leaching, and superior wear resistance. Microstructures and electrical resistivity can be tuned to specific applications.
Primary Features

  • Electrical insulating properties
  • Heat resistance
  • Wear resistance
  • Electrical insulator
  • High dielectric strength
  • Low dielectric loss
  • Corrosion resistance
  • Plasma resistance

Applications

  • Semiconductor manufacturing
  • Medical components
  • Electrical insulation
  • Wear-resistant components
  • Machinery
  • Fluid handling

Technical ceramic laser wall components for use in CO2 lasersHigh-purity alumina ceramic components for use in valves in various industries including oil & gas, chemical production, and other markets where high temperature performance is requiredHigh-purity alumina ceramic nozzle components for the semiconductor industryHigh-purity alumina precision plate with custom machining and large sizes for use in Semiconductor manufacturer marketsHigh-purity technical ceramic alumina precision rings with custom-machined holes for use in semiconductor manufacturing equipmentPrecision focus rings made from high-purity alumina ceramic for use in the semiconductor manufacturing industry

Materials

  • KMT-97 — 97% Al2O3
  • KMT-998 — 99.8% Al2O3
  • K1-A — 99.8% Al2O3
  • KMT-999 — 99.9% Al2O3

Material Properties for KemaTek Aluminas

 

Properties Units Test Aluminas Al2O3
Material Name     KMT-97 KMT-998 K1-A KMT-999
Color     White Ivory Ivory Ivory
Primary Material Content     97% Al2O3 99.8% Al2O3 99.8% Al2O3 99.9% Al2O3
Characteristics     Metallization, Wear Resistance Excellent anti-plasma properties, high wear resistance
Applications     IC packaging, electronic components, mechanical parts Semiconductor equipment components, wear and corrosion components
Bulk Density g/cc ASTM-C20 3.70 3.92 3.92 3.95
Water Absorption % ASTM-C373 0 0 0 0
Vickers Hardness (Load 500 g) GPa ASTM-C1327-03 13.8 17.3 18.0 18.5
Flexural Strength MPa ASTM-C1161-02c 350 350 3.50 3.50
Compressive Strength MPa ASTM-C773 2250 2450 2500 2600
Young’s Modulus of Elasticity GPa ASTM-C1198-01 330 360 365 380
Poisson’s Ratio — ASTM-C1198-01 0.23 0.23 0.22 0.23
Fracture Toughness MPa * m12 ASTM-C1421-01b (Kevron notched beam) 3 4 – 5 4 – 5 4 – 5
Coefficient of Linear Thermal Expansion, 40-400 ℃ x 10-6/℃ ASTM-C372-94 7.1 8.2 8.1 8.2
Thermal Conductivity, 20℃ W/(m • K) ASTM-C408-88 25 30 32 32
Specific Heat J/(Kg • K) x 103 ASTM-E1269 0.78 0.80 0.80 0.78
Thermal Shock Resistance ℃ Note 1 200 220 220 220
Volume Resistivity, 20℃ Ω • cm ASTM-D257-99 >1014 >1015 >1015 >1015
Dielectric Strength KV/mm ASTM-D149-97 16 17 17 17
Dielectric Constant, 1 MHz — ASTM-D150-98 (1 MHz) 9.0 9.8 9.8 9.7
Loss Tangent (x 10-4 ASTM-D150-98 (1 MHz) 3.0 1.0 1.0 1.0
Nitric Acid 60% 90℃ WT Loss (mg/cm2/day) — <0.12 <0.05 — —
Sulphuric Acid 95%, 95℃ WT Loss (mg/cm2/day) — <0.30 <0.23 — —
Caustic Soda 30%, 95℃ WT Loss (mg/cm2/day) — <0.90 <0.04 — —


Ceramic Materials Properties Chart — All Materials — PDF, 128K

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