Silicon Carbides

Large-scale silicon carbide wafer carrier for use in semiconductor

Silicon Carbide — SiC
Silicon Carbides offer exceptional hardness, corrosion resistance, wear resistance, superior strength, excellent thermal conductivity, and maintains good mechanical properties at high temperatures.

Primary Features

  • High hardness
  • Wear resistance
  • Excellent mechanical properties at high temperature
  • Corrosion resistance
  • High strength
  • Excellent thermal conductivity
  • Good thermal shock resistance
  • Best stiffness to weight ratio


  • Semiconductor manufacturing equipment components
  • High-temperature components
  • Sealing components
  • Wear-resistant components
  • Components requiring high-stiffness

high-purity silicon carbide sleeve for oil & gas applications where high heat and friction are factors for peformanceTall sleeve made from high-purity silicon carbide for use in oil & gas applications
Silicon carbide end effector for use in semiconductor manufacturing equipment with high heat, caustic plasma fluids, and high-purity environments


  • KMT-SiC — black
  • KMT-SSiC — black

Material Properties for KemaTek™ Silicon Carbides

Properties Units Test Silicon Carbides — SiC
Material Name KMT-SSiC KMT-SiSiC
Color Black Black
Primary Material Content
Characteristics High temperature strength, high chemical resistance, good thermal conductivity Good chemical and abrasion resistance
Applications Semiconductor equipment, sealing, and anti-heat components Abrasive and corrosion resistant components
Bulk Density g/cc ASTM-C20 3.15 3.02
Water Absorption % ASTM-C373 0 0
Vickers Hardness (Load 500 g) GPa ASTM-C1327-03 28.0 20.0
Flexural Strength MPa ASTM-C1161-02c 380 250
Compressive Strength MPa ASTM-C773 3900
Young’s Modulus of Elasticity GPa ASTM-C1198-01 410 330
Poisson’s Ratio ASTM-C1198-01 0.14
Fracture Toughness MPa * m12 ASTM-C1421-01b (Kevron notched beam) 4
Coefficient of Linear Thermal Expansion, 40-400 ℃ x 10-6/℃ ASTM-C372-94 4.0 4.5
Thermal Conductivity, 20℃ W/(m • K) ASTM-C408-88 120 45
Specific Heat J/(Kg • K) x 103 ASTM-E1269 0.65
Thermal Shock Resistance Note 1
Volume Resistivity, 20℃ Ω • cm ASTM-D257-99 102 — 106
Dielectric Strength KV/mm ASTM-D149-97
Dielectric Constant, 1 MHz ASTM-D150-98 (1 MHz)
Loss Tangent (x 10-4 ASTM-D150-98 (1 MHz)
Nitric Acid 60% 90℃ WT Loss (mg/cm2/day)
Sulphuric Acid 95%, 95℃ WT Loss (mg/cm2/day)
Caustic Soda 30%, 95℃ WT Loss (mg/cm2/day)

Technical ceramics material properties chart
Ceramic Materials Properties Chart — All Materials — PDF, 128K

For more information or to get a quote on your next refurbishment project, please contact us.