Wafer Processing Electrostatic Chucks (ESC) & Heaters
KemaTek manufactures heater and ESC aluminum nitride components and refurbishes used ESCs. Using their advance plasma sprays and refurbishing technologies, Kematek is able to make used ESCs look and operate like new.


  • High-purity advanced ceramic components
  • Leading-edge plasma spray coating technologies
    for superior resistance to attach from aggressive
    semiconductor plasmas
  • Thermally stable
  • Superior surface finishes
  • Tightly toleranced AlN wafers/substrates


  • Mature AlN manufacturing process
  • Proprietary masking techniques
  • Advanced plasma spray technologies
  • Precision machining
  • Proprietary non-contaminating machining techniques
  • High-tolerance, precision fine-hole machining

For more information, please contact us.